FFT Multislice Method—The Silver Anniversary

The first paper on the FFT multislice method was published in 1977, a quarter of a century ago. The formula was extended in 1982 to include a large tilt of an incident beam relative to the specimen surface. Since then, with advances of computing power, the FFT multislice method has been successfully applied to coherent CBED and HAADF-STEM simulations. However, because the multislice formula is built on some physical approximations and approximations in numerical procedure, there seem to be controversial conclusions in the literature on the multislice method. In this report, the physical implication of the multislice method is reviewed based on the formula for the tilted illumination. Then, some results on the coherent CBED and the HAADF-STEM simulations are presented.