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2006•IEEE Transactions on Semiconductor ManufacturingRequires access

A Survey of Automated Material Handling Systems in 300-mm Semiconductor Fabs

Gaurav K. Agrawal, Sunderesh S. Heragu

Open publisher page 118 citations

Abstract

The fast-paced developments and technological breakthroughs in the semiconductor manufacturing industry elevates the importance of optimum utilization of resources. The newer 300-mm wafers fabs place a high level of emphasis on increasing yield and reducing cycle times. Automated material handling systems are importanttools that help us achieve these objectives. In addition, due to the increased weight and size of 300-mm wafers, an automated material handling system isa must for a 300-mm manufacturing facility. This paper discusses various approaches for automated materials handling in semiconductor manufacturing industries.

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What this paper is about

The fast-paced developments and technological breakthroughs in the semiconductor manufacturing industry elevates the importance of optimum utilization of resources. The newer 300-mm wafers fabs place a high level of emphasis on increasing yield and reducing cycle times. Automated material handling systems are importanttools that help us achieve these objectives. In addition, due to the increased weight and size of 300-mm wafers, an automated material handling system isa must for a 300-mm manufacturing facility. This paper discusses various approaches for automated materials handling in semiconductor manufacturing industries.

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OpenAlex reports 118 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

The fast-paced developments and technological breakthroughs in the semiconductor manufacturing industry elevates the importance of optimum utilization of resources. The newer 300-mm wafers fabs place a high level of emphasis on increasing yield and reducing cycle times. Automated material handling systems are importanttools that help us achieve these objectives. In addition, due to the increased weight and size of 300-mm wafers, an automated material handling system isa must for a 300-mm manufacturing facility. This paper discusses various approaches for automated materials handling in semiconductor manufacturing industries.

Key concepts: Material handling, Manufacturing engineering, Semiconductor device fabrication, Semiconductor industry, Wafer, Semiconductor materials, Engineering, Automation

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