Effects of a loop array layer on a micro-inductor for future RF MEMS Components
Charles-Marie Tassetti, Gaëlle Lissorgues, Jean-Paul Gilles
Abstract
Charles-Marie Tassetti, Gaëlle Lissorgues, Jean-Paul Gilles
Abstract
Tunable micro-inductors can be designed controlling magnetic coupling coefficient. This paper presents the inductance variation produced by loops strongly magnetically coupled with a micro-inductor. A compact lumped element model, based on the geometry, gives result in good agreement with measurements in the RF frequency range. Then, this model will be applied to the study of the tunable MEMS inductor described below.
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Tunable micro-inductors can be designed controlling magnetic coupling coefficient. This paper presents the inductance variation produced by loops strongly magnetically coupled with a micro-inductor. A compact lumped element model, based on the geometry, gives result in good agreement with measurements in the RF frequency range. Then, this model will be applied to the study of the tunable MEMS inductor described below.
Key concepts: Inductor, Inductance, Microelectromechanical systems, Inductive coupling, Coupling (piping), Coupling coefficient of resonators, Radio frequency, Materials science