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2010•Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated EquipmentRequires access

Development of in situ, at-wavelength metrology for soft X-ray nano-focusing

Sheng Yuan, Valeriy V. Yashchuk, Kenneth A. Goldberg, Richard Celestre, Wayne R. McKinney, Gregory Y. Morrison, Tony Warwick, H. A. Padmore

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Key concepts: Optics, Metrology, Wavelength, Beamline, Wavefront, Physics, Nano-, X-ray optics

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Development of in situ, at-wavelength metrology for soft X-ray nano-focusing — Research Paper | ScholarLens