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The Emittance and Brightness of Ion Beams from a PIG Ion Source with End Extraction

H. Baumann, Κ. Bethge, G. Klein

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Abstract

The emittance of positive ion beams extracted from a PIG ion source with end extraction was measured for optimal operating conditions of the source at different positions of the beam line. The source was operated with noble gases in a high voltage - low current discharge mode. The results showed that the emittances increase with increasing ion mass and intensity of the ion beam and furthermore under the influence of the space charge of the beam with the distance from the source. For ion beam intensities of 1 mA values of the emittance were obtained between 0,4 and 1,1 cm mrad MeV1/2 at a distance of 10 cm behind the extraction region. The brightness varied from 0,15 to 1,3 mA cm-2 mrad-2 MeV.

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What this paper is about

The emittance of positive ion beams extracted from a PIG ion source with end extraction was measured for optimal operating conditions of the source at different positions of the beam line. The source was operated with noble gases in a high voltage - low current discharge mode. The results showed that the emittances increase with increasing ion mass and intensity of the ion beam and furthermore under the influence of the space charge of the beam with the distance from the source. For ion beam intensities of 1 mA values of the emittance were obtained between 0,4 and 1,1 cm mrad MeV1/2 at a distance of 10 cm behind the extraction region. The brightness varied from 0,15 to 1,3 mA cm-2 mrad-2 MeV.

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Available abstract

The emittance of positive ion beams extracted from a PIG ion source with end extraction was measured for optimal operating conditions of the source at different positions of the beam line. The source was operated with noble gases in a high voltage - low current discharge mode. The results showed that the emittances increase with increasing ion mass and intensity of the ion beam and furthermore under the influence of the space charge of the beam with the distance from the source. For ion beam intensities of 1 mA values of the emittance were obtained between 0,4 and 1,1 cm mrad MeV1/2 at a distance of 10 cm behind the extraction region. The brightness varied from 0,15 to 1,3 mA cm-2 mrad-2 MeV.

Key concepts: Thermal emittance, Ion source, Beam emittance, Ion, Ion beam, Beam (structure), Brightness, Ion beam deposition

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