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2009•Microelectronic EngineeringRequires access

Fabrication of Fresnel zone plates with 25nm zone width using extreme ultraviolet holography

Sankha S. Sarkar, Harun H. Solak, Jörg Raabe, Christian Dávid, J. F. van der Veen

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Key concepts: Zone plate, Fresnel zone, Optics, Holography, Wavelength, Interference (communication), Fabrication, Materials science

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