MEMS-based integrated head/actuator/slider for hard disk drives

We propose a new integrated head/actuator/slider concept for hard disk drives. This slider is batch fabricated on the sacrificial layer of a wafer together with an electrostatic microactuator via micromachining technology. We present the basic integrated head/actuator/slider design, the fabrication and flying-height tests of a micromachined slider body, and the design, fabrication, and testing of a prototype electrostatic microactuator. Slider warpage was analyzed and successfully suppressed to within 0.1 /spl mu/m. The slider was flown over a glass disk at heights of 26-81 nm and at linear velocities of 5-13 m/s. The test results of the electrostatic microactuator showed a stroke of 0.55 /spl mu/m, a very high mechanical resonant frequency of 34 kHz due to its low moving mass of 0.85 /spl mu/g, and a large force, estimated to be 21.3 /spl mu/N, generated by the actuator.