The ESD preventive measure based on the excessive mobile charge for advanced electron devices and production lines

For a better understanding of the electrostatic discharge (ESD) phenomena that have been damaging advanced electron devices, the charged device model (CDM) was re-modeled to focus on the device capacitance and the excessive mobile charge. Based on the model, the coulomb meter was used to measure the excessive mobile charge and a CDM tester with a built-in coulomb meter was developed. The test result clearly showed the related curves of the failure charge and voltage versus the device capacitance. Some instruments were developed to measure the failure factors obtained by the test. Consequently, these instruments made it possible to judge whether or not the devices failed in the production lines. Moreover, the applications showed that the events of the CDM and the stray capacitance model caused almost all the ESD failures.