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2001•Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomenaRequires access

Efficiency of Intrinsic Gettering for Copper in Silicon

Seiichi Isomae, Hidetsugu Ishida, Toshihiko Itoga, Kazuyuki Hozawa

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Key concepts: Materials science, Getter, Copper, Silicon, Metallurgy, Engineering physics, Optoelectronics, Engineering

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