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2011•Unpublished venueRequires access

System-level model of electrothermal microsystem with temperature control circuit

Tamara Bechtold, Evgenii B. Rudnyi, Dennis Hohlfeld

Open publisher page 4 citations

Abstract

In this paper we demonstrate a system-level simulation of a temperature controlled microsystem which is based on a reduced order model of a micro hotplate. Together with the electro-thermal microstructure we have implemented a control scheme, which allows the hotplate to operate either at a defined setpoint independent of ambient temperature or to follow defined temperature sweeps. An optimization algorithm was employed to identify suitable parameters for a PI-controller.

About this research paper

What this paper is about

In this paper we demonstrate a system-level simulation of a temperature controlled microsystem which is based on a reduced order model of a micro hotplate. Together with the electro-thermal microstructure we have implemented a control scheme, which allows the hotplate to operate either at a defined setpoint independent of ambient temperature or to follow defined temperature sweeps. An optimization algorithm was employed to identify suitable parameters for a PI-controller.

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OpenAlex reports 4 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

In this paper we demonstrate a system-level simulation of a temperature controlled microsystem which is based on a reduced order model of a micro hotplate. Together with the electro-thermal microstructure we have implemented a control scheme, which allows the hotplate to operate either at a defined setpoint independent of ambient temperature or to follow defined temperature sweeps. An optimization algorithm was employed to identify suitable parameters for a PI-controller.

Key concepts: Setpoint, Microsystem, Temperature control, Temperature measurement, Control theory (sociology), Controller (irrigation), Thermal, Control system

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