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2008•University of Twente Research InformationOpen access

Borosilicate glass (DURAN®) tubes as micro-fluidic interconnects

Berker Mogulkoc, Henri V. Jansen, H.J.M. ter Brake, M. Elwenspoek

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Abstract

Capillary bonding of glass tubes to silicon wafers has been elaborated. After proper preparation, tubes are placed on silicon substrates and specimens are annealed at sintering temperatures of glass. The resulting interconnect is capable of working above 70 bars of filling pressure and the bond is completely hermetic. However, due to high temperature annealing in air, surface devitrification has been observed on glass, which can be avoided by vacuum annealing

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Capillary bonding of glass tubes to silicon wafers has been elaborated. After proper preparation, tubes are placed on silicon substrates and specimens are annealed at sintering temperatures of glass. The resulting interconnect is capable of working above 70 bars of filling pressure and the bond is completely hermetic. However, due to high temperature annealing in air, surface devitrification has been observed on glass, which can be avoided by vacuum annealing

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Available abstract

Capillary bonding of glass tubes to silicon wafers has been elaborated. After proper preparation, tubes are placed on silicon substrates and specimens are annealed at sintering temperatures of glass. The resulting interconnect is capable of working above 70 bars of filling pressure and the bond is completely hermetic. However, due to high temperature annealing in air, surface devitrification has been observed on glass, which can be avoided by vacuum annealing

Key concepts: Devitrification, Borosilicate glass, Anodic bonding, Materials science, Annealing (glass), Sintering, Composite material, Capillary action

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