1991Journal of the American Ceramic SocietyRequires access

Fracture Toughness of Chemically Vapor‐Deposited Diamond

M. D. Drory, C. F. Gardinier, James S. Speck

Open publisher page 51 citations

Abstract

The fracture toughness of chemically vapor‐deposited diamond is estimated by a Vickers indentation method. Freestanding diamond films of 400‐μm thickness are produced with plasma‐enhanced chemical vapor deposition and highly polished for indentation testing. Indentation testing was performed with a microhardness tester using a load range of 5 to 8 N. The average fracture toughness is estimated as 5.3 ± 1.3 MPA · m 1/2 .

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The fracture toughness of chemically vapor‐deposited diamond is estimated by a Vickers indentation method. Freestanding diamond films of 400‐μm thickness are produced with plasma‐enhanced chemical vapor deposition and highly polished for indentation testing. Indentation testing was performed with a microhardness tester using a load range of 5 to 8 N. The average fracture toughness is estimated as 5.3 ± 1.3 MPA · m 1/2 .

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Available abstract

The fracture toughness of chemically vapor‐deposited diamond is estimated by a Vickers indentation method. Freestanding diamond films of 400‐μm thickness are produced with plasma‐enhanced chemical vapor deposition and highly polished for indentation testing. Indentation testing was performed with a microhardness tester using a load range of 5 to 8 N. The average fracture toughness is estimated as 5.3 ± 1.3 MPA · m 1/2 .

Key concepts: Indentation, Fracture toughness, Materials science, Diamond, Indentation hardness, Chemical vapor deposition, Composite material, Vickers hardness test

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