Fabrication of eyepieces lenses scale for optical microscope

Nowadays, eyepiece lenses in optical microscope have microscales so-called reticles or eyepiece lens scale. They are located at the focal plane inside the eyepiece lens of the microscope and allow an inspector to make accurate measurements of specimens. The scale of micrometer on eyepiece lens can be produced by using photolithography process. In this paper, both linear micrometer and circular frame micrometer have been investigated. The results show that such a TMEC patterning process can be controlled to achieve the linewidth pattern on the photomask and eyepiece lens glasses as its design specification. This invention facilitates the users in the local laboratories and industries who use the optical microscope in a daily basis.