2002Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and PhenomenaRequires access

Electrical contrast observations and voltage measurements by Kelvin probe force gradient microscopy

P. Girard, Michel Ramonda, D. Saluel

Open publisher page 38 citations

Abstract

Kelvin probe force gradient microscopy is proposed to image and measure local dc voltage variations using the double pass method. The various voltages between sensor and sample induce electrical force gradients that change the resonance of the sensor. Images of the various phase shifts show contrasts, which, as we demonstrate, can be interpreted in terms of local changes in voltage and capacitive coupling. The interest of this method for observation and local voltage measurements is demonstrated and explained.

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What this paper is about

Kelvin probe force gradient microscopy is proposed to image and measure local dc voltage variations using the double pass method. The various voltages between sensor and sample induce electrical force gradients that change the resonance of the sensor. Images of the various phase shifts show contrasts, which, as we demonstrate, can be interpreted in terms of local changes in voltage and capacitive coupling. The interest of this method for observation and local voltage measurements is demonstrated and explained.

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OpenAlex reports 38 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

Kelvin probe force gradient microscopy is proposed to image and measure local dc voltage variations using the double pass method. The various voltages between sensor and sample induce electrical force gradients that change the resonance of the sensor. Images of the various phase shifts show contrasts, which, as we demonstrate, can be interpreted in terms of local changes in voltage and capacitive coupling. The interest of this method for observation and local voltage measurements is demonstrated and explained.

Key concepts: Kelvin probe force microscope, Capacitive sensing, Voltage, Capacitive coupling, Materials science, Microscopy, Optics, Physics

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