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2011•Japanese Journal of Applied PhysicsRequires access

Fabrication of a Flexible Array for Tactile Sensors with Microcantilevers and the Measurement of the Distribution of Normal and Shear Forces

Daiki Hirashima, Tatsuya Uematsu, Masayuki Sohgawa, Wataru Mito, Takeshi Kanashima, Masanori Okuyama, Haruo Noma

Open publisher page 6 citations

Abstract

A Tactile sensor system consisting of elements with three microcantilevers embedded in a cylindrical elastomer has been fabricated by micro electromechanical systems (MEMS) technology. These sensor small size (3 ×4 mm2) chips are mounted on a flexible sheet, and thus the fabricated sensor array can be set even on a curved surface. In addition, the spacial distribution of normal and shear forces is obtained when two kinds of objects (an acrylic hemisphere and a brass cylinder) come in contact with the fabricated sensor shifted laterally. The distribution results appropriately reflect the surface shape of the object and give the behavior of the forces vector.

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What this paper is about

A Tactile sensor system consisting of elements with three microcantilevers embedded in a cylindrical elastomer has been fabricated by micro electromechanical systems (MEMS) technology. These sensor small size (3 ×4 mm2) chips are mounted on a flexible sheet, and thus the fabricated sensor array can be set even on a curved surface. In addition, the spacial distribution of normal and shear forces is obtained when two kinds of objects (an acrylic hemisphere and a brass cylinder) come in contact with the fabricated sensor shifted laterally. The distribution results appropriately reflect the surface shape of the object and give the behavior of the forces vector.

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OpenAlex reports 6 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

A Tactile sensor system consisting of elements with three microcantilevers embedded in a cylindrical elastomer has been fabricated by micro electromechanical systems (MEMS) technology. These sensor small size (3 ×4 mm2) chips are mounted on a flexible sheet, and thus the fabricated sensor array can be set even on a curved surface. In addition, the spacial distribution of normal and shear forces is obtained when two kinds of objects (an acrylic hemisphere and a brass cylinder) come in contact with the fabricated sensor shifted laterally. The distribution results appropriately reflect the surface shape of the object and give the behavior of the forces vector.

Key concepts: Tactile sensor, Shear force, Fabrication, Materials science, Elastomer, Normal force, Shear (geology), Microelectromechanical systems

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