Beam diagnostics extracted from radio frequency driven ion source

Lower ignition voltage (50 up to 200 V) and higher plasma intensity feature the characteristics of the rf driven in vacuum arc ion source. The source is considered self-extracted ion current and could deliver ion currents of ∼10 mA for thin beam (φ∼4 mm) and ∼20 mA for broad beam (φ∼6 cm) at ∼200 V extraction voltage. In this work an investigation is made for the beam diagnostics which include: the beam profiles, beam emittance, energy spread and distribution of the ion species in the ion beam. The increase of the anode voltage affects the decrease of the beam emittance, while the energy spread increases with the decrease of the discharge pressure. The beam emittance is found to be around 200 up to 400 mm mrad. and the energy spread of the ions in the ion beam is around 40 up to 80 eV. The Ar ion specie extracted from the source could reach Ar+5. The beam profiles show that the beam is more convergent with the increase of the accelerating voltage and with the use of proper capacitors between the extraction electrodes.