The study on MEMS-based micro pump technology

The micropump, an important operational device of MEMS, plays a very important role in micro systems. As the micropump becomes smaller and smaller, the fabrication of the moving parts becomes more and more difficult. Therefore, many micropumps based on new principles have been developed. They are divided into two types, pumps with mechanical components and ones without them. To date, most of these micropumps are membrane-driven. The research on the micropump in the past decade is reviewed. The current status of micropump research, the structural designs and principle of operation of microfluidic controlling systems are presented in this paper. Some unresolved problems are discussed. Finally, new ideas are put forward.