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1995•Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and AtomsOpen access

Boron depth profiles in silicon and simulation of α-spectra

Liao Changgeng, Jian Hui, Yong‐Qiang Wang, Zheng Zhihao

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Key concepts: Boron, Silicon, Materials science, Amorphous silicon, Spectral line, Doping, Amorphous solid, Analytical Chemistry (journal)

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