2013•Unpublished venueRequires access

Development of MEMS electric split-ring resonator arrays as tunable THz filters

Fusheng Ma, You Qian, Yu‐Sheng Lin, Hongwei Liu, Xinhai Zhang, Chengkuo Lee

Abstract

Structurally reconfigurable metamaterials showing terahertz frequency tunability are presented, which employ deformable microelectromechanical curved cantilevers for tuning the resonance frequency of the electric split-ring resonators. The observed tunability can be applied in tunable metamaterial devices.

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Available abstract

Key concepts: Terahertz radiation, Metamaterial, Resonator, Split-ring resonator, Microelectromechanical systems, Materials science, Optoelectronics, Cantilever