Investigation for the operation of an integrated peristaltic micropump

An investigation into the pumping flow rates and the time-resolved membrane actuation of a microperistaltic pump integrated within a micro total analysis system (µTAS) is presented. The results include (i) the design of the driver circuit to operate the peristaltic micropump, (ii) Michelson interferometer measurements of the pump displacement and (iii) pump flow rate measurements. The peristaltic micropump, configured with three PZT actuated glass membranes and silicon channels, is integrated within the µTAS device with microfluidic reaction chambers. The micropump pumps a 1 µl droplet back and forth between the reaction chambers.