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Localized lubrication of micromachines: A feasibility study on Si in reciprocating sliding with PFPE as the lubricant

Leong Yonghui Jonathan, V. Harikumar, N. Satyanarayana, Sujeet Kumar Sinha

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Key concepts: Lubrication, Lubricant, Materials science, Reciprocating motion, Tribology, Microelectromechanical systems, Composite material, Dry lubricant

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Localized lubrication of micromachines: A feasibility study on Si in reciprocating sliding with PFPE as the lubricant — Research Paper | ScholarLens