2012•Research on Chemical IntermediatesRequires access

Effect of the sputtering parameters on the physical properties and photocatalytic reactivity of TiO2 thin films prepared by an RF magnetron sputtering deposition method

Afshin Ebrahimi, Masaaki Kitano, Kazushi Iyatani, Yu Horiuchi, Masato Takeuchi, Masaya Matsuoka, Masakazu Anpo

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Key concepts: Sputtering, Sputter deposition, Photocatalysis, Thin film, Materials science, Substrate (aquarium), Visible spectrum, Deposition (geology)

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Effect of the sputtering parameters on the physical properties and photocatalytic reactivity of TiO2 thin films prepared by an RF magnetron sputtering deposition method — Research Paper | ScholarLens