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1984•Journal of The Electrochemical SocietyOpen access

The Nitridation of Thick Germanium Oxide Films on Single‐Crystal Germanium

E. E. Crisman, Otto J. Gregory, P. J. Stiles

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Abstract

The far‐infrared (FIR) transmission properties and index of refraction of thick (∼ 2000 Å) vitreous germanium oxide films on single‐crystal germanium have been measured before and after high temperature reaction with flowing ammonia gas. Significant shifts in the transmission spectra were observed as a function of both time at temperature and NH 3 flow rate. Correlation was observed with transmission minima reported in the literature for fine powders of germanium nitride and for thin (<1000Å) layers of ion‐implanted and annealed germanium/oxygen and germanium/nitrogen complexes. In addition, when the nitrided films were reoxidized at high pressure, structure was observed which corresponded to FIR transmission of hexagonal‐phase GeO 2 powder specimens.

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What this paper is about

The far‐infrared (FIR) transmission properties and index of refraction of thick (∼ 2000 Å) vitreous germanium oxide films on single‐crystal germanium have been measured before and after high temperature reaction with flowing ammonia gas. Significant shifts in the transmission spectra were observed as a function of both time at temperature and NH 3 flow rate. Correlation was observed with transmission minima reported in the literature for fine powders of germanium nitride and for thin (<1000Å) layers of ion‐implanted and annealed germanium/oxygen and germanium/nitrogen complexes. In addition, when the nitrided films were reoxidized at high pressure, structure was observed which corresponded to FIR transmission of hexagonal‐phase GeO 2 powder specimens.

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Available abstract

The far‐infrared (FIR) transmission properties and index of refraction of thick (∼ 2000 Å) vitreous germanium oxide films on single‐crystal germanium have been measured before and after high temperature reaction with flowing ammonia gas. Significant shifts in the transmission spectra were observed as a function of both time at temperature and NH 3 flow rate. Correlation was observed with transmission minima reported in the literature for fine powders of germanium nitride and for thin (<1000Å) layers of ion‐implanted and annealed germanium/oxygen and germanium/nitrogen complexes. In addition, when the nitrided films were reoxidized at high pressure, structure was observed which corresponded to FIR transmission of hexagonal‐phase GeO 2 powder specimens.

Key concepts: Germanium, Germanium oxide, Nitriding, Materials science, Analytical Chemistry (journal), Oxide, Nitride, Mineralogy

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