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2001•Surface and Coatings TechnologyRequires access

Chemical and physical sputtering of aluminium and gold samples using Ar–H2 DC-glow discharges

C. Budtz-Jørgensen, P. Kringhøj, Jørgen Feldbæk Nielsen, J. Bøttiger

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Key concepts: Sputtering, Glow discharge, Aluminium, Materials science, Ion, Hydrogen, Atomic physics, Analytical Chemistry (journal)

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