2013Sensors and Actuators A PhysicalRequires access

High-sensitivity triaxial tactile sensor with elastic microstructures pressing on piezoresistive cantilevers

Thanh‐Vinh Nguyen, Nguyen Binh-Khiem, Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama

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Key concepts: Piezoresistive effect, Tactile sensor, Materials science, Cantilever, Pressing, Sensitivity (control systems), Microstructure, Optoelectronics

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