High-sensitivity triaxial tactile sensor with elastic microstructures pressing on piezoresistive cantilevers
Thanh‐Vinh Nguyen, Nguyen Binh-Khiem, Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama
Abstract
Thanh‐Vinh Nguyen, Nguyen Binh-Khiem, Hidetoshi Takahashi, Kiyoshi Matsumoto, Isao Shimoyama
Abstract
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Key concepts: Piezoresistive effect, Tactile sensor, Materials science, Cantilever, Pressing, Sensitivity (control systems), Microstructure, Optoelectronics