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Structure and properties of metal and alloy thin films prepared by plasma-enhanced metalorganic chemical vapor deposition

Tyau-Jeen Lin

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Key concepts: Chemical vapor deposition, Alloy, Materials science, Thin film, Metal, Metallurgy, Combustion chemical vapor deposition, Plasma

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Structure and properties of metal and alloy thin films prepared by plasma-enhanced metalorganic chemical vapor deposition — Research Paper | ScholarLens