1997•Optics & Laser TechnologyRequires access

Measurement of the thickness and refractive indices of multiple layers by a confocal interference microscope using a low coherence source

Taskashi Fukano, Ichirou Yamaguchi

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Key concepts: Waveplate, Optics, Birefringence, Polarization (electrochemistry), Interferometry, Interference (communication), Microscope, Mueller calculus

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