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Properties and Fabrication of Micro Fresnel Zone Plates

A. H. Firester

Open publisher page 16 citations

Abstract

Arrays of ~2-mm diam, f/9, diffraction-limited Fresnel zone plates are made and measured. Amplitude zone plates are fabricated by conventional photolithographic techniques, while a specially developed evaporation/etching technique is used for phase zone plates. The point spread function of such zone plates is measured with a rotating cube scanner and found to agree closely with theory over more than one order of magnitude.

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What this paper is about

Arrays of ~2-mm diam, f/9, diffraction-limited Fresnel zone plates are made and measured. Amplitude zone plates are fabricated by conventional photolithographic techniques, while a specially developed evaporation/etching technique is used for phase zone plates. The point spread function of such zone plates is measured with a rotating cube scanner and found to agree closely with theory over more than one order of magnitude.

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Available abstract

Arrays of ~2-mm diam, f/9, diffraction-limited Fresnel zone plates are made and measured. Amplitude zone plates are fabricated by conventional photolithographic techniques, while a specially developed evaporation/etching technique is used for phase zone plates. The point spread function of such zone plates is measured with a rotating cube scanner and found to agree closely with theory over more than one order of magnitude.

Key concepts: Fresnel zone, Zone plate, Optics, Fresnel diffraction, Materials science, Fresnel zone antenna, Fresnel equations, Etching (microfabrication)

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