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2006•Applied Physics LettersOpen access

Organic CuTCNQ integrated in complementary metal oxide semiconductor copper back end-of-line for nonvolatile memories

R. Müller, S. De Jonge, Kris Myny, Dirk J. Wouters, Jan Genoe, Paul L. Heremans

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Abstract

Nanowires of the organometallic semiconductor CuTCNQ were grown from TCNQ vapor in 250nm diameter vias of a Cu back end-of-line process. Corresponding prototypes of cross-point Cu∕CuTCNQ nanowire/Al memories exhibited nonvolatile bistable conductive switching for several ten write-erase cycles with switching currents below 10μA and current densities 1000 times higher than for large-area devices. Scaling of memory elements was also investigated.

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Nanowires of the organometallic semiconductor CuTCNQ were grown from TCNQ vapor in 250nm diameter vias of a Cu back end-of-line process. Corresponding prototypes of cross-point Cu∕CuTCNQ nanowire/Al memories exhibited nonvolatile bistable conductive switching for several ten write-erase cycles with switching currents below 10μA and current densities 1000 times higher than for large-area devices. Scaling of memory elements was also investigated.

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Available abstract

Nanowires of the organometallic semiconductor CuTCNQ were grown from TCNQ vapor in 250nm diameter vias of a Cu back end-of-line process. Corresponding prototypes of cross-point Cu∕CuTCNQ nanowire/Al memories exhibited nonvolatile bistable conductive switching for several ten write-erase cycles with switching currents below 10μA and current densities 1000 times higher than for large-area devices. Scaling of memory elements was also investigated.

Key concepts: Materials science, Back end of line, Non-volatile memory, Nanowire, Bistability, Electrical conductor, Nanotechnology, Optoelectronics

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