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Oxide formation on the silicon (111) surface studied by Auger electron spectroscopy and by low energy electron loss spectroscopy

N. Lieske, Rudolf Hezel

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Key concepts: Auger electron spectroscopy, Electron energy loss spectroscopy, Electron spectroscopy, Spectroscopy, Silicon, Chemistry, Oxide, Chemical bond

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Oxide formation on the silicon (111) surface studied by Auger electron spectroscopy and by low energy electron loss spectroscopy — Research Paper | ScholarLens