2012•Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIERequires access
Low-cost unimorph deformable mirror with high actuator count for astronomical adaptive optics
Jianqiang Ma, Ying Liu, Chen Xu, Hao Rong, Baoqing Li, Jiaru Chu
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Abstract
A low-cost silicon unimorph deformable mirror (DM) with 214 actuators is presented. The finite element simulation indicates that the designed DM has an excellent correction performance for both low order and high order aberrations. The experimental actuator deflection is about 2μm at 100V. This DM has the potential to be used for astronomical adaptive optics.