Laterally resolved crystalline damage in single-point-diamond-turned silicon
Chris Jeynes, Keith E. Puttick, Lawrence Whitmore, K. Gärtner, Anthony E. Gee, D.K. Millen, Roger P Webb, R.M.A. Peel, Brian J. Sealy
Abstract
Chris Jeynes, Keith E. Puttick, Lawrence Whitmore, K. Gärtner, Anthony E. Gee, D.K. Millen, Roger P Webb, R.M.A. Peel, Brian J. Sealy
Abstract
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Key concepts: Channelling, Microbeam, Diamond, Materials science, Silicon, Transmission electron microscopy, Amorphous solid, Layer (electronics)