1983Japanese Journal of Applied PhysicsOpen access

Compact Metal-Ion Beam Source Using Thermal Contact Ionizer

Yoshiyuki Sakai, Itsuo Katsumata, Takanori Oshio

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Abstract

A small, compact ion beam source which can function in an external magnetic field has been developed for use with a heavy ion beam probe for plasma diagnostics. The source consists of a thermal contact ionizer with a beam material reservoir and an electrostatic lens system for beam acceleration and focusing. The beam can be modulated by means of a beam-extracting electrode. An alkali or an alkali earth metal ion beam was produced at energies up to 3 keV. The source functioned sufficiently well in a magnetic field up to 2 kG. The operating parameters for Cs+ and Ba+ ion beams were investigated in detail. A beam current up to 10 µA and a small diameter of 1 mm at the focusing point were obtained.

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A small, compact ion beam source which can function in an external magnetic field has been developed for use with a heavy ion beam probe for plasma diagnostics. The source consists of a thermal contact ionizer with a beam material reservoir and an electrostatic lens system for beam acceleration and focusing. The beam can be modulated by means of a beam-extracting electrode. An alkali or an alkali earth metal ion beam was produced at energies up to 3 keV. The source functioned sufficiently well in a magnetic field up to 2 kG. The operating parameters for Cs+ and Ba+ ion beams were investigated in detail. A beam current up to 10 µA and a small diameter of 1 mm at the focusing point were obtained.

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Available abstract

A small, compact ion beam source which can function in an external magnetic field has been developed for use with a heavy ion beam probe for plasma diagnostics. The source consists of a thermal contact ionizer with a beam material reservoir and an electrostatic lens system for beam acceleration and focusing. The beam can be modulated by means of a beam-extracting electrode. An alkali or an alkali earth metal ion beam was produced at energies up to 3 keV. The source functioned sufficiently well in a magnetic field up to 2 kG. The operating parameters for Cs+ and Ba+ ion beams were investigated in detail. A beam current up to 10 µA and a small diameter of 1 mm at the focusing point were obtained.

Key concepts: Ion beam, Beam (structure), Ion gun, Ion beam deposition, Electrostatic lens, Ion source, Alkali metal, Atomic physics

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