2010•Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIERequires access
Effects of mechanical inaccuracies on the measurement result in metrology systems
Florian Schneider, Markus Schinhaerl, Christian Vogt, Roland Maurer, Peter Sperber, Rolf Rascher, Richard Stamp, Gordon Smith
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Abstract
Metrological systems commonly consist of a mechanical axial framework. However, any mechanical inaccuracies in such axial systems may cause falsifications in the measurement results. Therefore, precise knowledge of the effects of mechanical inaccuracies on measurement results is essential for measurement error compensation. This paper discusses the results of a testing series with a topographical coordinate measurement machine for the measurement of precision optical components in order to analyse and specify the different effects of mechanical inaccuracies on measurement results. The results obtained are not only beneficial for the design of new measurement machines and techniques. They may also be advantageously used for rapid measurement error compensation in metrological systems.