Abstract: Fabrication and electrical properties of insulated thin film inductors

A process for the fabrication of multiturn inductors is described. Inductors are prepared by depositing alternate oxide and metal films through a series of suitable masks. The inductors have a concentric square or rectangular configuration, and the axis of the core is normal to the substrate. An empirical expression, similar to that given by Grover,1 was developed and relates the inductance to the physical dimensions and number of turns of the coil. The dependence of the quality factor (Q) on frequency and the self−resonant frequency on oxide thickness were investigated.