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2008•Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and PhenomenaRequires access

Fabrication of ideally ordered anodic porous alumina with large area by vacuum deposition of Al onto mold

Kazuyuki Nishio, Takashi Yanagishita, Sho Hatakeyama, Hiroaki Maegawa, Hideki Masuda

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Key concepts: Fabrication, Mold, Materials science, Deposition (geology), Porosity, Vacuum deposition, Anode, Metallurgy

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