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1984•Applied Physics LettersRequires access

Air-bridge microbolometer for far-infrared detection

Dean P. Neikirk, D.B. Rutledge

Open publisher page 30 citations

Abstract

A new microbolometer for far-infrared detection has been fabricated that allows an increase in sensitivity of a factor of 4 over the best previously reported bolometer. By suspending the detector in the air above its substrate a reduction in the thermal conductance out of the device by a factor of 5 has been achieved. At a modulation frequency of 100 kHz this microbolometer has an electrical noise equivalent power of 2.8×10−11 W(Hz)−1/2. A thermal model is also presented that accurately fits the response of the detector.

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What this paper is about

A new microbolometer for far-infrared detection has been fabricated that allows an increase in sensitivity of a factor of 4 over the best previously reported bolometer. By suspending the detector in the air above its substrate a reduction in the thermal conductance out of the device by a factor of 5 has been achieved. At a modulation frequency of 100 kHz this microbolometer has an electrical noise equivalent power of 2.8×10−11 W(Hz)−1/2. A thermal model is also presented that accurately fits the response of the detector.

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Available abstract

A new microbolometer for far-infrared detection has been fabricated that allows an increase in sensitivity of a factor of 4 over the best previously reported bolometer. By suspending the detector in the air above its substrate a reduction in the thermal conductance out of the device by a factor of 5 has been achieved. At a modulation frequency of 100 kHz this microbolometer has an electrical noise equivalent power of 2.8×10−11 W(Hz)−1/2. A thermal model is also presented that accurately fits the response of the detector.

Key concepts: Microbolometer, Bolometer, Detector, Noise-equivalent power, Materials science, Optoelectronics, Infrared, Noise (video)

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