1997•Analytical SciencesRequires access

Experimental Evaluation of the Mo Ka X-Ray Probing Depth for a GaAs Wafer in a Total-Reflection X-Ray Fluorescence Analysis

Kouichi Tsuji, Kazuaki Wagatsuma, Takeo Oku

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Key concepts: Total internal reflection, X-ray fluorescence, Chemistry, Wafer, Fluorescence, Reflection (computer programming), Optics, X-ray

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Experimental Evaluation of the Mo Ka X-Ray Probing Depth for a GaAs Wafer in a Total-Reflection X-Ray Fluorescence Analysis — Research Paper | ScholarLens