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2008•Sensors and Actuators A PhysicalRequires access

An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon

Reza Abdolvand, Farrokh Ayazi

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Key concepts: Passivation, Deep reactive-ion etching, Etching (microfabrication), Materials science, Reactive-ion etching, Trench, Argon, Silicon

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