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Three-beam interferometric profilometer

Kais Almarzouk

Open publisher page 9 citations

Abstract

A noncontact optical technique for the measurement of thin-film thickness and surface roughness with 25-Å and 2-μm vertical and horizontal resolutions, respectively, has been described. It is based on a common-path three-beam shearing interferometer, in which the outer beams act as a reference while the middle beam scans the surface. The results of this technique are comparable with the ones obtained with a stylus instrument.

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What this paper is about

A noncontact optical technique for the measurement of thin-film thickness and surface roughness with 25-Å and 2-μm vertical and horizontal resolutions, respectively, has been described. It is based on a common-path three-beam shearing interferometer, in which the outer beams act as a reference while the middle beam scans the surface. The results of this technique are comparable with the ones obtained with a stylus instrument.

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Available abstract

A noncontact optical technique for the measurement of thin-film thickness and surface roughness with 25-Å and 2-μm vertical and horizontal resolutions, respectively, has been described. It is based on a common-path three-beam shearing interferometer, in which the outer beams act as a reference while the middle beam scans the surface. The results of this technique are comparable with the ones obtained with a stylus instrument.

Key concepts: Optics, Profilometer, Stylus, Interferometry, Shearing interferometer, Materials science, Reference beam, Surface finish

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