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1993•Journal of Crystal GrowthRequires access

On the effect of arsine for the decomposition of triethylgallium during epitaxial growth of GaAs

Knut Deppert, Jan Jönson

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Key concepts: Arsine, Triethylgallium, Chemistry, Decomposition, Desorption, Epitaxy, Stibine, Inorganic chemistry

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On the effect of arsine for the decomposition of triethylgallium during epitaxial growth of GaAs — Research Paper | ScholarLens