Development of Domestic Spherical Aberration Correction Electron Microscope, R005

A domestic spherical aberration corrected 300 kV transmission electron microscope named R005, which stands for 0.05 nm resolution, was developed. It has double aberration correctors in probe-forming and image-forming systems for high-resolution scanning transmission electron microscope (STEM) and conventional transmission electron microscope (TEM) observation. Asymmetric corrector optic system was developed to compress the parasitic aberration and the increase of chromatic aberration. Automatic aberration correction systems for STEM and TEM have been implemented. Neighboring atomic columns of Ga (63 pm spacing) in a GaN [211] crystalline specimen was resolved in a high angle annular dark field (HAADF) STEM image for the first time.