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Growth and characterization of nanostructured anatase phase TiO2 thin films prepared by DC reactive unbalanced magnetron sputtering

Surasing Chaiyakun, Artorn Pokaipisit, Pichet Limsuwan, Boonlaer Ngotawornchai

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Key concepts: Anatase, Thin film, Sputtering, Materials science, Sputter deposition, Crystallite, Crystallinity, Analytical Chemistry (journal)

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Growth and characterization of nanostructured anatase phase TiO2 thin films prepared by DC reactive unbalanced magnetron sputtering — Research Paper | ScholarLens