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2008•Journal of Electromagnetic Waves and ApplicationsRequires access

Permittivity Measurement of Ferroelectric Thin Film Based on CPW Transmission Line

Yunqiu Wu, Zongxi Tang, Yuehang Xu, Xiaoli He, B. Zhang

Open publisher page 15 citations

Abstract

The complex permittivity measurement of ferroelectric thin film is discussed in this paper. Considering the small thickness of ferroelectric thin film, the CPW (coplanar waveguide) with material under test (MUT) deposited on the Al2O3 is used as measurement configuration. The propagation constant is calculated and the complex permittivity of the MUT is extracted from effective permittivity by using SVR (support vector regression) method. The results show that the errors of both real part and imaginary part of the permittivity (ε′r and ε′′r ) are less than 1%.

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What this paper is about

The complex permittivity measurement of ferroelectric thin film is discussed in this paper. Considering the small thickness of ferroelectric thin film, the CPW (coplanar waveguide) with material under test (MUT) deposited on the Al2O3 is used as measurement configuration. The propagation constant is calculated and the complex permittivity of the MUT is extracted from effective permittivity by using SVR (support vector regression) method. The results show that the errors of both real part and imaginary part of the permittivity (ε′r and ε′′r ) are less than 1%.

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OpenAlex reports 15 citations for this work. Citation counts describe recorded attention and do not establish research quality.

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Available abstract

The complex permittivity measurement of ferroelectric thin film is discussed in this paper. Considering the small thickness of ferroelectric thin film, the CPW (coplanar waveguide) with material under test (MUT) deposited on the Al2O3 is used as measurement configuration. The propagation constant is calculated and the complex permittivity of the MUT is extracted from effective permittivity by using SVR (support vector regression) method. The results show that the errors of both real part and imaginary part of the permittivity (ε′r and ε′′r ) are less than 1%.

Key concepts: Permittivity, Coplanar waveguide, Materials science, Ferroelectricity, Relative permittivity, Transmission line, Thin film, Optoelectronics

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