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2007•Journal of Applied CrystallographyOpen access

Electron density map using multiple scattering in grazing-incidence small-angle X-ray scattering

Byeongdu Lee, Insun Park, Hae‐Woong Park, C. C. H. Lo, Taihyun Chang, Randall E. Winans

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Abstract

The electron density map of a block copolymer thin film having the hexagonally perforated layer (HPL) structure was directly obtained from the measured grazing-incidence small-angle X-ray scattering (GISAXS) pattern, exploiting the multiple-scattering phenomena present in GISAXS. It is shown that GISAXS is in principle equivalent to three-beam diffraction, which has been used to extract phases of diffraction peaks. In addition, X-ray reflectivity analysis has been performed which, when combined with the GISAXS results, provides full details of the HPL structure.

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What this paper is about

The electron density map of a block copolymer thin film having the hexagonally perforated layer (HPL) structure was directly obtained from the measured grazing-incidence small-angle X-ray scattering (GISAXS) pattern, exploiting the multiple-scattering phenomena present in GISAXS. It is shown that GISAXS is in principle equivalent to three-beam diffraction, which has been used to extract phases of diffraction peaks. In addition, X-ray reflectivity analysis has been performed which, when combined with the GISAXS results, provides full details of the HPL structure.

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Available abstract

The electron density map of a block copolymer thin film having the hexagonally perforated layer (HPL) structure was directly obtained from the measured grazing-incidence small-angle X-ray scattering (GISAXS) pattern, exploiting the multiple-scattering phenomena present in GISAXS. It is shown that GISAXS is in principle equivalent to three-beam diffraction, which has been used to extract phases of diffraction peaks. In addition, X-ray reflectivity analysis has been performed which, when combined with the GISAXS results, provides full details of the HPL structure.

Key concepts: Grazing-incidence small-angle scattering, Scattering, Small-angle X-ray scattering, Materials science, Electron density, Diffraction, Optics, Biological small-angle scattering

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