Adaptive Impedance Matching System

In order to resolve the real-time, fast and stable matching problems as to the dynamic load of microwave plasma, including O2, N2, CF4, NF3, N2H2, etc, through the introduction of six-port test theory and impedance matching theory, the authors put forward a new method called automatic impedance match, which calculated reflectance using the FDTD algorithm. And they use the relationship between pin insertion depth and reflectance of port surface under HFSS simulation automatic impedance matching system to make pin insertion depth and port reflectance form corresponding relation. In the impedance matching system, use the corresponding relation so as to minimize the reflectance, and adjust pin insertion depth into the best position to achieve fast matching in impedance system. As simulation results indicate that the load impedance standing wave factor variation ranges in 0-10, the standing wave ratio (VSWR) of port could basically meet the engineering requirements.