1996•VacuumRequires access

Pump-down characteristics of outgassed clean stainless steel vacuum chamber and surface analysis of the chamber wall

Yuko HIROHATA, Atsutoshi MUTOH, Tomoaki Hino, T. Yamashina, Takashi Kikuchi, Nobuharu OHSAKO

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Key concepts: Outgassing, Vacuum chamber, Electropolishing, Ultra-high vacuum, Desorption, Materials science, Vacuum pump, X-ray photoelectron spectroscopy