2006•Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIERequires access
Application of miniature interferometers in nanomeasuring and positioning technology
Jinping Chen, Tong Guo, Xing Fu, Chunguang Hu
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Abstract
In this article, a work on applying miniature interferometers in nano measuring and positioning system will be introduced. Several types of miniature interferometers, including corner-cube-retroreflector ones, plane-mirror-retroreflector ones and their derivations, will be described. Based on the single-beam plane-mirror interferometers, the triaxial metric system of a Nano Positioning and Measuring Machine (NPMM) is set up. In a working space of 25 mm x 25 mm x 5 mm, the system obeys the "Abbe Principle" to the maximum, having a resolution of 0.1 nm and an uncertainty of measurement of 5 nm - 10 nm.