Research on the Effect of Mechanical Processing on Lithium Tantalate Crystal Pyroelectric Coefficient

Lithium tantalate (LT) is a kind of excellent pyroelectric materials that can be made into high performance pyroelectric detector. As the detector voltage response and detection rate inversely proportional to the thickness of the infrared sensing element, So the thinning of lithium tantalate crystals becomes a key of success. This design uses CMP method to produce 50 μm thickness of LT wafer, and via charge integration method with computer automatic test system to test the pyroelectric coefficient of crystals with different thickness and surface roughness. The pyroelectric coefficient of crystal achieved 203 μC·m-2k-1 proves the favorable pyroelectric properties.