Simulation of piezoelectric sensor-actuators based on multi-piezoelectric effect
Wang Lijing, Shi Liping, Yuerong Zhao
Abstract
Wang Lijing, Shi Liping, Yuerong Zhao
Abstract
With the advances of studies on multi-piezoelectric effect, it has become possible to integrate structure and function of sensor with actuators into the single piezoelectric element. This paper analyzes and simulates integrated sensor-actuators by using 3-D finite element model which of models is piezoelectric quartz and ceramic sheet PZT-5 in the beginning of positive piezoelectric effect; the results are proved that the functions of sensors and actuators can be integrated in the single piezoelectric crystal based on multi-piezoelectric effect.
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With the advances of studies on multi-piezoelectric effect, it has become possible to integrate structure and function of sensor with actuators into the single piezoelectric element. This paper analyzes and simulates integrated sensor-actuators by using 3-D finite element model which of models is piezoelectric quartz and ceramic sheet PZT-5 in the beginning of positive piezoelectric effect; the results are proved that the functions of sensors and actuators can be integrated in the single piezoelectric crystal based on multi-piezoelectric effect.
Key concepts: Piezoelectricity, Piezoelectric sensor, PMUT, Actuator, Piezoelectric accelerometer, Materials science, Finite element method, Piezoelectric coefficient